Stacked via structure disposed on a conductive pillar of a semiconductor die

ABSTRACT

A stacked via structure disposed on a conductive pillar of a semiconductor die is provided. The stacked via structure includes a first dielectric layer, a first conductive via, a first redistribution wiring, a second dielectric layer, a second conductive via, and a second redistribution wiring. The first dielectric layer covers the semiconductor die. The first conductive via is embedded in the first dielectric layer and electrically connected to the conductive pillar. The first redistribution wiring covers the first conductive via and the first dielectric layer. The second dielectric layer covers the first dielectric layer and the first redistribution wiring. The second conductive via is embedded in the second dielectric layer and landed on the first redistribution wiring. The second redistribution wiring covers the second conductive via and the second dielectric layer. A lateral dimension of the first conductive via is greater than a lateral dimension of the second conductive via.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of a prior application Ser. No. 17/243,600, filed onApr. 29, 2021 and now allowed. The entirety of the above-mentionedpatent application is hereby incorporated by reference herein and made apart of this specification.

BACKGROUND

The semiconductor industry has experienced rapid growth due tocontinuous improvements in the integration density of various electroniccomponents (i.e., transistors, diodes, resistors, capacitors, etc.). Forthe most part, this improvement in integration density has come fromrepeated reductions in minimum feature size, which allows more of thesmaller components to be integrated into a given area. These smallerelectronic components also require smaller packages that utilize lessarea than previous packages. Some smaller types of packages forsemiconductor components include quad flat packages (QFPs), pin gridarray (PGA) packages, ball grid array (BGA) packages, and so on.

Currently, integrated fan-out packages are becoming increasingly popularfor their compactness. In the integrated fan-out packages, thereliability of the redistribution circuit structure fabricated on themolding compound is highly concerned.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1 through 11 illustrate a process flow for fabricating apackage-on package (PoP) structure in accordance with some embodimentsof the present disclosure.

FIG. 12A, FIG. 12B, FIG. 13 , FIG. 14A, FIG. 14B, FIG. 15A and FIG. 15Bare enlarged views of the region X illustrated in FIG. 11 in accordancewith various embodiments of the present disclosure.

FIG. 16 is a package-on package (PoP) structure in accordance with somealternative embodiments of the present disclosure.

FIG. 17A, FIG. 17B, FIG. 17C, FIG. 18A, FIG. 18B, FIG. 18C, and FIG. 19are enlarged views of the region X illustrated in FIG. 16 in accordancewith various embodiments of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIGS. 1 through 11 illustrate a process flow for fabricating apackage-on package (PoP) structure in accordance with some embodimentsof the present disclosure.

Referring to FIG. 1 , a semiconductor wafer 100 including semiconductordies 200 is provided. Before a wafer dicing process is performed on thesemiconductor wafer 100, the semiconductor dies 200 of the semiconductorwafer 100 are connected one another. In some embodiments, thesemiconductor wafer 100 includes a semiconductor substrate 110,conductive pads 120 formed on the semiconductor substrate 110, and apassivation layer 130. The passivation layer 130 is formed over thesemiconductor substrate 110 and includes contact openings 132 such thatthe conductive pads 120 are partially exposed by the contact openings132 of the passivation layer 130. For example, the semiconductorsubstrate 110 may be a silicon substrate including active components(e.g., transistors or the like) and passive components (e.g., resistors,capacitors, inductors or the like) formed therein; the conductive pads120 may be aluminum pads, copper pads or other suitable metal pads; andthe passivation layer 130 may be a silicon dioxide layer, a siliconnitride layer, a silicon oxy-nitride layer or a dielectric layer formedby other suitable dielectric materials.

As shown in FIG. 1 , in some embodiments, the semiconductor wafer 100may optionally include a post-passivation layer 140 formed over thepassivation layer 130. The post-passivation layer 140 covers thepassivation layer 130 and includes contact openings 142. The conductivepads 120 exposed by the contact openings 132 of the passivation 130 arepartially exposed by the contact openings 142 of the post passivationlayer 140. For example, the post-passivation layer 140 may be apolyimide (PI) layer, a polybenzoxazole (PBO) layer, or a dielectriclayer formed by other suitable polymers.

Referring to FIG. 2 , conductive pillars 150 are formed on theconductive pads 120. In some embodiments, the conductive pillars 150 areplated on the conductive pads 120. The plating process for forming theconductive pillars 150 is described in detail as followings. First, aseed layer is sputtered onto the post-passivation layer 140 and theconductive pads 120 exposed by the contact openings 142. A patternedphotoresist layer (not shown) is then formed over the seed layer by aphotolithography process, wherein the patterned photoresist layerexposes portions of the seed layer that are corresponding to theconductive pads 120. The semiconductor wafer 100 including the patternedphotoresist layer formed thereon is then immersed into a platingsolution of a plating bath such that the conductive pillars 150 areplated on the portions of the seed layer that are corresponding to theconductive pads 120. After the plated conductive pillars 150 are formed,the patterned photoresist layer is stripped. Thereafter, by using theconductive pillars 150 as a mask, portions of the seed layer that arenot covered by the conductive pillars 150 are removed through etchinguntil the post passivation layer 140 is exposed, for example. In someembodiments, the conductive pillars 150 are plated copper pillars orother suitable metallic pillars.

Referring to FIG. 3 , after the conductive pillars 150 are formed, aprotection layer 160 is formed on the post passivation layer 140 so asto cover the conductive pillars 150. In some embodiments, the protectionlayer 160 may be a polymer layer having sufficient thickness toencapsulate and protect the conductive pillars 150. For example, theprotection layer 160 may be a polybenzoxazole (PBO) layer, a polyimide(PI) layer or other suitable polymers. In some alternative embodiments,the protection layer 160 may be made of inorganic materials.

Referring to FIG. 4 , a back side grinding process is performed on theback surface of the semiconductor wafer 100 after the protection layer160 is formed. During the back side grinding process, the semiconductorsubstrate 110 is ground such that a thinned semiconductor wafer 100′including a thinned semiconductor substrate 110′ is formed. In someembodiments, the back side grinding process includes mechanical grindingprocess, a chemical mechanical polishing process, or combinationsthereof.

Referring to FIG. 5 , after performing the back side grinding process, awafer dicing process is performed on the thinned semiconductor wafer100′ such that the semiconductor dies 200 in the thinned semiconductorwafer 100′ are singulated from one another. Each of the singulatedsemiconductor dies 200 may include a semiconductor substrate 110 a, theconductive pads 120 formed on the semiconductor substrate 110 a, apassivation layer 130 a, a post passivation layer 140 a, the conductivepillars 150, and a protection layer 160 a. As shown in FIG. 4 and FIG. 5, the materials and the characteristics of the semiconductor substrate110 a, the passivation layer 130 a, the post passivation layer 140 a,and the protection layer 160 a are the same as those of thesemiconductor substrate 110 a, the passivation layer 130, the postpassivation layer 140, and the protection layer 160 mentioned above.Thus, the detailed descriptions of the semiconductor substrate 110 a,the passivation layer 130 a, the post passivation layer 140 a, and theprotection layer 160 a are omitted.

As shown in FIG. 4 and FIG. 5 , during the back side grinding processand the wafer dicing process, the protection layer 160 and theprotection layer 160 a may well protect the conductive pillars 150 ofthe semiconductor dies 200. In addition, the conductive pillars 150 ofthe semiconductor dies 200 may be protected from being damaged bysequentially performed processes, such as pick-up and placing process ofthe semiconductor dies 200, a molding process for laterallyencapsulating the semiconductor dies 200, and so on.

Referring to FIG. 6 , after the semiconductor dies 200 are singulatedfrom the thinned semiconductor wafer 100′ (shown in FIG. 4 ), a carrierC including a de-bonding layer DB formed thereon is provided. In someembodiments, the carrier C is a glass substrate, a ceramic carrier, orthe like. The carrier C may have a round top-view shape and a size of acommon silicon wafer. For example, carrier C may have an 8-inchdiameter, a 12-inch diameter, or the like. The de-bonding layer DB maybe formed of a polymer-based material (e.g., a Light To Heat Conversion(LTHC) material), which may be removed along with the carrier C from theoverlying structures that will be formed in subsequent steps. In someembodiments, the de-bonding layer DB is formed of an epoxy-basedthermal-release material. In other embodiments, the de-bonding layer DBis formed of an ultra-violet (UV) glue. The de-bonding layer DB may bedispensed as a liquid and cured. In alternative embodiments, thede-bonding layer DB is a laminate film and is laminated onto the carrierC. The top surface of the de-bonding layer DB is substantially planar.

As illustrated in FIG. 6 , a back side redistribution circuit structureincluding a dielectric layers DI and redistribution wirings W sandwichedbetween the dielectric layers DI. The dielectric layers DI includes abottom dielectric layer DI-1 and a top dielectric layer DI-2 coveringthe bottom dielectric layer DI-1 and the redistribution wirings W. Insome embodiments, the bottom dielectric layer DI-1 is formed of polymer,which may also be photo-sensitive material such as polybenzoxazole(PBO), polyimide, benzocyclobutene (BCB), or the like, which may beeasily patterned using a photolithography process. In alternativeembodiments, the bottom dielectric layer DI-1 is formed of nitride suchas silicon nitride, oxide such as silicon oxide, PhosphoSilicate Glass(PSG), BoroSilicate Glass (BSG), Boron-doped PhosphoSilicate Glass(BPSG), or the like. The formation of the redistribution wirings W mayinclude forming a seed layer (not shown) over a bottom dielectric layerDI-1, forming a patterned mask (not shown) such as a photoresist layerover the seed layer, and then performing a plating process on theexposed seed layer. The patterned mask and the portions of the seedlayer covered by the patterned mask are then removed, leaving theredistribution wirings W as shown in FIG. 6 . In accordance with someembodiments, the seed layer includes a titanium layer and a copper layerover the titanium layer. The seed layer may be formed using, forexample, Physical Vapor Deposition (PVD). The plating may be performedusing, for example, electroless plating. As shown in FIG. 6 , a topdielectric layer DI-2 among the dielectric layers DI is formed over thebottom dielectric layer DI-1 to cover the redistribution wirings W. Thebottom surface of the top dielectric layer DI-2 is in contact with thetop surfaces of the redistribution wirings W and the bottom dielectriclayer DI-1. In accordance with some embodiments of the presentdisclosure, the top dielectric layer DI-2 is formed of a polymer, whichmay be a photo-sensitive material such as PBO, polyimide, BCB, or thelike. In some alternative embodiments, the top dielectric layer DI-2 isformed of nitride such as silicon nitride, oxide such as silicon oxide,PSG, BSG, BPSG, or the like. The top dielectric layer DI-2 is thenpatterned to form openings therein. Hence, portions of theredistribution wirings W are exposed through the openings in the topdielectric layer DI-2.

After forming the top dielectric layer DI-2 of the redistributioncircuit structure over the de-bonding layer DB carried by the carrier C,metal posts TV are formed on the redistribution circuit structure andelectrically connected to the redistribution wirings W of theredistribution circuit structure. Throughout the description, the metalposts TV are alternatively referred to as conductive through-vias TVsince the metal posts TV penetrate through the subsequently formedmolding material (shown in FIG. 8 ). In some embodiments, the conductivethrough-vias TV are formed by plating. The plating of the conductivethrough-vias TV may include forming a blanket seed layer (not shown)over the top dielectric layer DI-2 and extending into the openingsdefined in the top dielectric layer DI-2, forming and patterning aphotoresist (not shown), and plating the conductive through-vias TV onthe portions of the seed layer that are exposed through the openings inthe photoresist. The photoresist and the portions of the seed layer thatare covered by the photoresist are then removed. The material of theconductive through-vias TV may include copper, aluminum, or the like.The conductive through-vias TV may have the shape of rods. The top-viewshapes of the conductive through-vias TV may be circles, rectangles,squares, hexagons, or the like.

In some embodiments, at least two singulated semiconductor dies 200 eachincluding the conductive pads 120, the conductive pillars 150, and aprotection layer 160 a formed thereon are picked and placed on thedielectric layer DI. The singulated semiconductor dies 200 are picked-upand place on the top dielectric layer DI-2 and adhered with the topdielectric layer DI-2 through a die attach film (DAF), adhesion paste orthe like. In some alternative embodiments, the semiconductor dies 200are picked and placed on the top dielectric layer DI-2 in a side-by-sidemanner. The conductive through vias TV may be classified into groups.The number of groups of the semiconductor dies 200 is corresponding tothe number of the groups of the conductive through vias TV. Each groupof semiconductor dies 200 may be surrounded by a group of conductivethrough vias TV, respectively.

As shown in FIG. 6 , the top surface of the protection layer 160 a islower than the top surfaces of the conductive through vias TV, and thetop surface of the protection layer 160 a is higher than the topsurfaces of the conductive pillars 150, for example. However, thedisclosure is not limited thereto. In some alternative embodiments, thetop surface of the protection layer 160 a may be substantially alignedwith the top surfaces of the conductive through vias TV, and the topsurface of the protection layer 160 a is higher than the top surfaces ofthe conductive pillars 150. The semiconductor dies 200 are picked andplaced on the top dielectric layer DI-2 after the formation of theconductive through vias TV. In some alternative embodiments, thesemiconductor dies 200 are picked and placed on the top dielectric layerDI-2 before the formation of the conductive through vias TV.

Referring to FIG. 7 , an insulating material 210 is formed on the topdielectric layer DI-2 to cover the semiconductor dies 200 and theconductive through vias TV. In some embodiments, the insulating material210 is a molding compound formed by a molding process. The insulatingencapsulation material 210 may fill the gaps between neighboringconductive through-vias TV, the gaps between the semiconductor dies 200,and the gaps between the conductive through-vias TV and thesemiconductor dies 200. The top surface of the insulating encapsulationmaterial 210 is higher than the top surfaces of the semiconductor dies200 and the top surfaces of the conductive through-vias TV. Asillustrated in FIG. 7 , the conductive pillars 150 and the protectionlayer 160 a of the semiconductor die 200 are covered by the insulatingmaterial 210. In other words, the conductive pillars 150 and theprotection layer 160 a of the semiconductor die 200 are not revealed andare well protected by the insulating material 210. In some embodiments,the insulating material 210 includes epoxy or other suitable dielectricmaterials.

Referring to FIG. 8 , the insulating material 210 is then ground untilthe top surfaces of the conductive pillars 150, the top surfaces of theconductive through vias TV, and the top surface of the protection layer160 a′ are exposed. In some embodiments, the insulating material 210 isground by a mechanical grinding process and/or a chemical mechanicalpolishing (CMP) process. After the insulating material 210 is ground, aninsulating encapsulation 210′ is formed over the top dielectric layerDI-2. During the grinding process of the insulating material 210,portions of the protection layer 160 a are ground to form a protectionlayer 160 a′. In some embodiments, during the grinding process of theinsulating material 210 and the protection layer 160 a, portions of theconductive through vias TV and portions of the conductive pillars 150are ground also.

As shown in FIG. 8 , the insulating encapsulation 210′ laterallyencapsulates the sidewalls of the semiconductor dies 200, and theinsulating encapsulation 210′ is penetrated by the conductive throughvias TV. In other words, the semiconductor dies 200 and the conductivethrough vias TV are embedded in the insulating encapsulation 210′. It isnoted that the top surfaces of the conductive through vias TV, the topsurface of the insulating encapsulation 210′, and the top surfaces ofthe conductive pillars 150 are substantially coplanar with the topsurface of the protection layer 160 a′.

Referring to FIG. 9 , after forming the insulating encapsulation 210′and the protection layer 160 a′, a front side redistribution circuitstructure electrically connected to the conductive pillars 150 of thesemiconductor dies 200 is formed on the top surfaces of the conductivethrough vias TV, the top surface of the insulating encapsulation 210′,the top surfaces of the conductive pillars 150, and the top surface ofthe protection layer 160 a′. The front side redistribution circuitstructure is fabricated to electrically connect with one or moreconnectors underneath. Here, the afore-said connectors may be theconductive pillars 150 of the semiconductor dies 200 and/or theconductive through vias TV embedded in the insulating encapsulation210′. The front side redistribution circuit structure is described inaccompany with FIG. 9 in detail.

The front side redistribution circuit structure may include a dielectriclayer PM1, a dielectric layer PM2, a dielectric layer PM3, conductivevias CV1, conductive vias CV2, conductive vias CV3, redistributionwirings RDL1, redistribution wirings RDL2, and redistribution wiringsRDL3. The conductive vias CV1 are embedded in the dielectric layer PM1,the conductive vias CV2 are embedded in the dielectric layer PM2, andthe conductive vias CV3 are embedded in the dielectric layer PM3. Inother words, the conductive vias CV1 penetrate through the dielectriclayer PM1, the conductive vias CV2 penetrate through the dielectriclayer PM2, and the conductive vias CV3 penetrate through the dielectriclayer PM3. The redistribution wirings RDL1 are disposed on the topsurface of the dielectric layer PM1 and located between the dielectriclayer PM1 and the dielectric layer PM2. The redistribution wirings RDL2are disposed on the top surface of the dielectric layer PM2 and locatedbetween the dielectric layer PM2 and the dielectric layer PM3. Theredistribution wirings RDL3 are disposed on the top surface of thedielectric layer PM3. Portions of the redistribution wirings RDL1 areelectrically connected to the conductive pillars 150 through theconductive vias CV1. Portions of the redistribution wirings RDL2 areelectrically connected to the redistribution wirings RDL1 through theconductive vias CV2. Portions of the redistribution wirings RDL3 areelectrically connected to the redistribution wirings RDL2 through theconductive vias CV3. In some embodiments, the dielectric layers PM1,PM2, and PM3 are formed of a polymer, which may be a photo-sensitivematerial such as PBO, polyimide, BCB, or the like. In an embodimentwhere the material of the dielectric layers PM1, PM2, and PM3 is aphoto-sensitive material, the dielectric layers PM1, PM2, and PM3 areformed by a deposition process such as a chemical vapor deposition (CVD)process, and the dielectric layers PM1, PM2, and PM3 are patterned by aphotolithography process such that via holes are formed in thedielectric layers PM1, PM2, and PM3. In some alternative embodiments,the dielectric layers PM1, PM2, and PM3 are formed of nitride such assilicon nitride, oxide such as silicon oxide, PSG, BSG, BPSG, or thelike. In an embodiment where the material of the dielectric layers PM1,PM2, and PM3 is nitride or oxide, the dielectric layers PM1, PM2, andPM3 are formed by a deposition process such as a CVD process, and thedielectric layers PM1, PM2, and PM3 are patterned through an etchprocess by using a patterned photoresist layer as an etch mask such thatvia holes are formed in the dielectric layers PM1, PM2, and PM3. Thematerial of the dielectric layers PM1, PM2, and PM3 may be identical toor different from each other. In some embodiments, the material of theredistribution wirings RDL1, RDL2, and RDL3 may include copper,aluminum, alloy thereof, or the like. In some embodiments, the materialof the conductive vias CV1, CV2, and CV3 may include copper, aluminum,alloy thereof, or the like.

A first dielectric material is deposited on the top surfaces of theconductive through vias TV, the top surface of the insulatingencapsulation 210′, the top surfaces of the conductive pillars 150, andthe top surface of the protection layer 160 a′. The deposited firstdielectric material is patterned to form the dielectric layer PM1 havingvia holes therein. The via holes defined in the dielectric layer PM1 maylocate above and expose the top surfaces of the conductive pillars 150and the top surfaces of the conductive through vias TV. Then, theconductive vias CV1 and redistribution wirings RDL1 are formed over thedielectric layer PM1 through a deposition process followed by apatterning process such that the conductive vias CV1 fills the via holesdefined in the dielectric layer PM1 and the redistribution wirings RDL1covers the conductive vias CV1 and a top surface of the dielectric layerPM1. It is noted that portions of the redistribution wirings RDL1 mayserve as bottom tiered bridging wirings electrically connected betweenthe adjacent semiconductor dies 200.

A second dielectric material is deposited on a top surface of thedielectric layer PM1 to cover the redistribution wirings RDL1. Thedeposited second dielectric material is patterned to form the dielectriclayer PM2 having via holes therein. The via holes defined in thedielectric layer PM2 may locate above and expose the top surfaces of theredistribution wirings RDL1. Then, the conductive vias CV2 andredistribution wirings RDL2 are formed over the dielectric layer PM2through a deposition process followed by a patterning process such thatthe conductive vias CV2 fills the via holes defined in the dielectriclayer PM2 and the redistribution wirings RDL2 covers the conductive viasCV2 and the top surface of the dielectric layer PM2. It is noted thatportions of the redistribution wirings RDL2 may serve as middle tieredbridging wirings electrically connected between the adjacentsemiconductor dies 200.

A third dielectric material is deposited on a top surface of thedielectric layer PM2 to cover the redistribution wirings RDL2. Thedeposited third dielectric material is patterned to form the dielectriclayer PM3 having via holes therein. The via holes defined in thedielectric layer PM3 may locate above and expose the top surfaces of theredistribution wirings RDL2. Then, the conductive vias CV3 andredistribution wirings RDL3 are formed over the dielectric layer PM3through a deposition process followed by a patterning process such thatthe conductive vias CV3 fills the via holes defined in the dielectriclayer PM3 and the redistribution wirings RDL3 covers the conductive viasCV3 and the top surface of the dielectric layer PM3. It is noted thatportions of the redistribution wirings RDL3 may serve as top tieredbridging wirings electrically connected between the adjacentsemiconductor dies 200. In some embodiments, two tiers of redistributionwirings among the redistribution wirings RDL1, RDL2 and RDL3 serve asbridging wirings electrically connected between the adjacentsemiconductor dies 200. In some alternative embodiments, three tiers ofredistribution wirings RDL1, RDL2 and RDL3 serve as bridging wiringselectrically connected between the adjacent semiconductor dies 200.Furthermore, more than three layers of redistribution wirings may beformed in the front side redistribution circuit structure, and thebridging wirings for electrically connecting the adjacent semiconductordies 200 may be formed in at least two layers of redistribution wirings.

Referring to FIG. 10 , after forming the front side redistributioncircuit structure, a dielectric layer PM4, conductive pads 220, andconductive terminals 230 are formed over the front side redistributioncircuit structure. The dielectric layer PM4 is formed on the dielectriclayer PM3 to cover redistribution wirings RDL3. The conductive pads 220are formed on the dielectric layer PM4 and are electrically connected tothe redistribution wirings RDL3. The conductive terminals 230 lands onthe conductive pads 220 and electrically connected to the front sideredistribution circuit structure through the pads 220. In someembodiments, the conductive pads 220 include under-ball metallurgy (UBM)patterns for ball mount and/or connection pads for mounting of passivecomponents. The dielectric layer PM4 may be formed of nitride such assilicon nitride, oxide such as silicon oxide, PSG, BSG, BPSG, or thelike. The material of the dielectric layer PM4 may be identical to ordifferent from the dielectric layers PM1, PM2, and PM3. In someembodiments, the material of the conductive pads 220 may include copper,aluminum, alloy thereof, or the like. In some embodiments, theconductive terminals 230 may include solder balls, metal pillars, metalpillars covered by solder caps, or the like. Throughout the description,the combined structure including the semiconductors dies 200, theconductive through-vias TV, the insulating encapsulant 210′, the frontside redistribution circuit structures and the back side redistributioncircuit structures will be referred to as a package, which may be acomposite wafer with a round top-view shape.

Referring to FIG. 11 , the package is de-bonded from carrier C. Thede-bonding layer DB is also cleaned from the package. The de-bondingprocess may be performed by irradiating a light such as UV light orlaser on the de-bonding layer DB to decompose the de-bonding layer DB.In the de-bonding process, a tape (not shown) may be adhered onto thedielectric layer PM4 and the conductive terminals 230. In subsequentsteps, the carrier C and the de-bonding layer DB are removed from thepackage. A die saw process is performed to saw the package into multipleIntegrated Fanout (InFO) package structures P, each including at leasttwo semiconductor dies 200, conductive through-vias TV, an insulatingencapsulant 210′, a front side redistribution circuit structure, and aback side redistribution circuit structure. One of the resultingpackages is shown as a package structure P illustrated in FIG. 11 .

FIG. 11 illustrates a PoP structure in accordance with some embodimentsof the present disclosure. Referring to FIG. 11 , another packagestructure 300 is provided and bonded with the package structure P suchthat a PoP structure is formed. In some embodiments of the presentdisclosure, the bonding between the package structure 300 and thepackage structure P is performed through solder regions 310, which joinsthe redistribution wirings W to the metal pads in the package structure300. In some embodiments, the package 300 includes device dies 302,which may be memory dies such as Static Random Access Memory (SRAM)dies, Dynamic Random Access Memory (DRAM) dies, or the like. The memorydies may also be bonded to package substrate 304 in some exemplaryembodiments.

As illustrated in FIG. 11 , the PoP structure includes a packagestructure 300 and a package structure P electrically connected to thepackage structure 300 through solder regions 310. The package structureP includes at least two semiconductor dies 200, conductive through-viasTV, an insulating encapsulation 210′ laterally encapsulating thesemiconductor dies 200 and the conductive through-vias TV, a back sideredistribution circuit structure, a front side redistribution circuitstructure, a dielectric layer PM4, conductive pads 220, and conductiveterminals 230. The back side redistribution circuit structure includesdielectric layers DI and redistribution wirings W. The front sideredistribution circuit structure includes dielectric layers PM1 throughPM3, conductive vias CV1 through CV3, and redistribution wirings RDL1through RDL3.

FIG. 12A, FIG. 12B, FIG. 13 , FIG. 14A, FIG. 14B, FIG. 15A and FIG. 15Bare enlarged views of the region X illustrated in FIG. 11 in accordancewith various embodiments of the present disclosure. In order toestablish multi-layered bridging wirings, various types of stacked viastructures capable of minimizing via crack issue resulted fromconcentrated stress are proposed.

Referring to FIG. 12A and FIG. 12B, a stacked via structure including adielectric layer PM1, a conductive via CV1, a redistribution wiringsRDL1, a dielectric layer PM2, a conductive via CV2, a redistributionwirings RDL2, a dielectric layer PM3, a conductive via CV3, aredistribution wirings RDL3, and a dielectric layer PM4 is proposed. Thedielectric layer PM1 covers the conductive pillar 150 and the protectionlayer 160 a′. The conductive via CV1 is embedded in a via hole definedby the dielectric layer PM1 and electrically connected to the conductivepillar 150. The redistribution wirings RDL1 is electrically connected tothe conductive pillars 150 through the conductive via CV1, and theredistribution wirings RDL1 includes a pad portion covering thedielectric layer PM1 and the conductive via CV1. The conductive via CV1is entirely covered by the pad portion of the redistribution wiringsRDL1. The dielectric layer PM2 covers the dielectric layer PM1 and theredistribution wirings RDL1. The conductive via CV2 is embedded in a viahole defined by the dielectric layer PM2 and electrically connected tothe redistribution wirings RDL1. The redistribution wirings RDL2 iselectrically connected to the redistribution wirings RDL1 through theconductive via CV2, and the redistribution wirings RDL2 includes a padportion covering the dielectric layer PM2 and the conductive via CV2.The conductive via CV2 is entirely covered by the pad portion of theredistribution wirings RDL2. The dielectric layer PM3 covers thedielectric layer PM2 and the redistribution wirings RDL2. The conductivevia CV3 is embedded in a via hole defined by the dielectric layer PM3and electrically connected to the redistribution wirings RDL2. Theredistribution wirings RDL3 is electrically connected to theredistribution wirings RDL2 through the conductive via CV3, and theredistribution wirings RDL3 includes a pad portion covering thedielectric layer PM3 and the conductive via CV3. The conductive via CV3is entirely covered by the pad portion of the redistribution wiringsRDL3. The dielectric layer PM4 covers the dielectric layer PM3 and theredistribution wirings RDL3.

As illustrated in FIG. 12A and FIG. 12B, the conductive vias CV1, CV2,and CV3 respectively includes tapered sidewalls. The bottom width CD1 ofthe conductive vias CV1 and CV2 is less than the top width CD2 of theconductive vias CV1 and CV2. The bottom width CD3 of the conductive viaCV3 is less than the top width CD4 of the conductive via CV3. The bottomwidth CD3 of the conductive via CV3 is less than the bottom width CD1 ofthe conductive vias CV1 and CV2. The top width CD4 of the conductive viaCV3 is greater than the bottom width CD1 of the conductive vias CV1 andCV2, and the top width CD4 of the conductive via CV3 is less than thetop width CD2 of the conductive vias CV1 and CV2. The bottom width CD1of the conductive vias CV1 and CV2 may range from about 5 micrometers toabout 10 micrometers, and a ratio of the bottom width CD3 of theconductive via CV3 and the bottom width CD1 of the conductive vias CV1and CV2 may range from about 0.7 to about 0.9. The lateral dimension(e.g., diameter or width) of the pad portion of the redistributionwirings RDL1 may be greater than the top width CD2 of the conductive viaCV1. The lateral dimension (e.g., diameter or width) of the pad portionof the redistribution wirings RDL2 may be greater than the top width CD2of the conductive via CV2. The lateral dimension (e.g., diameter orwidth) of the pad portion of the redistribution wirings RDL3 may begreater than the top width CD4 of the conductive via CV3. Since thebottom width CD3 of the conductive via CV3 is less than the bottom widthCD1 of the conductive vias CV1 and CV2, the stacked via structureincluding the conductive vias CV1, CV2, and CV3 is capable of minimizevia crack issue resulted from concentrated stress. As illustrated inFIG. 12A, the conductive vias CV1, CV2, and CV3 are stacked along astacking direction, and the centerlines of the conductive vias CV1, CV2,and CV3 are aligned in the stacking direction. As illustrated in FIG.12B, the conductive vias CV1, CV2, and CV3 are stacked along a stackingdirection, and the centerlines of the conductive vias CV1 and CV2 arenot aligned with the centerline of the conductive via CV3 in thestacking direction. In other words, the centerlines of the conductivevias CV1 and CV2 may offset from the centerline of the conductive viaCV3 by a lateral distance D. In some embodiments, the lateral distance Dis greater than 0 and less than 10 micrometers.

As illustrated in FIG. 12A and FIG. 12B, the contact area of theconductive pillar 150 and the conductive via CV1 is substantially equalto the contact area of the redistribution wirings RDL1 and theconductive via CV2. Further, the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theredistribution wirings RDL2 and the conductive via CV3.

Referring to FIG. 13 , a stacked via structure including a dielectriclayer PM1, a conductive via CV1, a redistribution wirings RDL1, adielectric layer PM2, a conductive via CV2, a redistribution wiringsRDL2, a dielectric layer PM3, a redistribution wirings RDL3, and adielectric layer PM4 is proposed. The dielectric layer PM1 covers theconductive pillar 150 and the protection layer 160 a′. The conductivevia CV1 is embedded in a via hole defined by the dielectric layer PM1and electrically connected to the conductive pillar 150. Theredistribution wirings RDL1 is electrically connected to the conductivepillars 150 through the conductive via CV1, and the redistributionwirings RDL1 includes a pad portion covering the dielectric layer PM1and the conductive via CV1. The conductive via CV1 is entirely coveredby the pad portion of the redistribution wirings RDL1. The dielectriclayer PM2 covers the dielectric layer PM1 and the redistribution wiringsRDL1. The conductive via CV2 is embedded in a via hole defined by thedielectric layer PM2 and electrically connected to the redistributionwirings RDL1. The redistribution wirings RDL2 is electrically connectedto the redistribution wirings RDL1 through the conductive via CV2, andthe redistribution wirings RDL2 includes a pad portion covering thedielectric layer PM2 and the conductive via CV2. The conductive via CV2is entirely covered by the pad portion of the redistribution wiringsRDL2. The dielectric layer PM3 covers the dielectric layer PM2 and theredistribution wirings RDL2. The redistribution wirings RDL3 is locatedabove and spaced apart from the redistribution wirings RDL2 by thedielectric layer PM3. The dielectric layer PM4 covers the dielectriclayer PM3 and the redistribution wirings RDL3.

As illustrated in FIG. 13 , the conductive vias CV1 and CV2 respectivelyincludes tapered sidewalls. The bottom width CD1 of the conductive viaCV1 is less than the top width CD1 of the conductive via CV1. The bottomwidth CD3 of the conductive via CV2 is less than the top width CD4 ofthe conductive via CV2. The bottom width CD3 of the conductive via CV2is less than the bottom width CD1 of the conductive via CV1. The topwidth CD4 of the conductive via CV2 is greater than the bottom width CD1of the conductive via CV, and the top width CD4 of the conductive viaCV2 is less than the top width CD2 of the conductive via CV1. The bottomwidth CD1 of the conductive via CV1 may range from about 5 micrometersto about 10 micrometers, and a ratio of the bottom width CD3 of theconductive via CV2 and the bottom width CD1 of the conductive via CV1may range from about 0.7 to about 0.9. The lateral dimension (e.g.,diameter or width) of the pad portion of the redistribution wirings RDL1may be greater than the top width CD2 of the conductive via CV1. Thelateral dimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL2 may be greater than the top width CD4 of theconductive via CV2. Since the bottom width CD3 of the conductive via CV2is less than the bottom width CD1 of the conductive via CV1, the stackedvia structure including the conductive vias CV1 and CV2 is capable ofminimize via crack issue resulted from concentrated stress. Asillustrated in FIG. 13 , the conductive vias CV1 and CV2 are stackedalong a stacking direction, and the centerlines of the conductive viaCV1 and CV2 are aligned in the stacking direction. In some alternativeembodiments, not illustrated in figures, the conductive vias are stackedalong a stacking direction, and the centerlines of the conductive viasis not aligned with the centerline of the conductive via in the stackingdirection.

As illustrated in FIG. 13 , the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theredistribution wirings RDL1 and the conductive via CV2.

Referring to FIG. 14A and FIG. 14B, a stacked via structure including adielectric layer PM1, a conductive via CV1, a redistribution wiringsRDL1, a dielectric layer PM2, a conductive via CV2, a redistributionwirings RDL2, a dielectric layer PM3, a conductive via CV3, aredistribution wirings RDL3, and a dielectric layer PM4 is proposed. Thedielectric layer PM1 covers the conductive pillar 150 and the protectionlayer 160 a′. The conductive via CV1 is embedded in a via hole definedby the dielectric layer PM1 and electrically connected to the conductivepillar 150. The redistribution wirings RDL1 is electrically connected tothe conductive pillars 150 through the conductive via CV1, and theredistribution wirings RDL1 includes a pad portion covering thedielectric layer PM1 and the conductive via CV1. The conductive via CV1is entirely covered by the pad portion of the redistribution wiringsRDL1. The dielectric layer PM2 covers the dielectric layer PM1 and theredistribution wirings RDL1. The conductive via CV2 is embedded in a viahole defined by the dielectric layer PM2 and electrically connected tothe redistribution wirings RDL1. The redistribution wirings RDL2 iselectrically connected to the redistribution wirings RDL1 through theconductive via CV2, and the redistribution wirings RDL2 includes a padportion covering the dielectric layer PM2 and the conductive via CV2.The conductive via CV2 is entirely covered by the pad portion of theredistribution wirings RDL2. The dielectric layer PM3 covers thedielectric layer PM2 and the redistribution wirings RDL2. The conductivevia CV3 is embedded in a via hole defined by the dielectric layer PM3and electrically connected to the redistribution wirings RDL2. Theredistribution wirings RDL3 is electrically connected to theredistribution wirings RDL2 through the conductive via CV3, and theredistribution wirings RDL3 includes a pad portion covering thedielectric layer PM3 and the conductive via CV3. The conductive via CV3is entirely covered by the pad portion of the redistribution wiringsRDL3. The dielectric layer PM4 covers the dielectric layer PM3 and theredistribution wirings RDL3.

As illustrated in FIG. 14A, the conductive vias CV1, CV2, and CV3respectively includes tapered sidewalls. The bottom width CD1 of theconductive via CV1 is less than the top width CD2 of the conductive viaCV1. The bottom width CD3 of the conductive vias CV2 and CV3 is lessthan the top width CD4 of the conductive vias CV2 and CV3. The bottomwidth CD3 of the conductive vias CV2 and CV3 is less than the bottomwidth CD1 of the conductive via CV1. The top width CD4 of the conductivevias CV2 and CV3 is greater than the bottom width CD1 of the conductivevia CV1, and the top width CD4 of the conductive vias CV2 and CV3 isless than the top width CD2 of the conductive via CV1. The bottom widthCD1 of the conductive via CV1 may range from about 5 micrometers toabout 10 micrometers, and a ratio of the bottom width CD3 of theconductive vias CV2 and CV3 and the bottom width CD1 of the conductivevia CV1 may range from about 0.7 to about 0.9. The lateral dimension(e.g., diameter or width) of the pad portion of the redistributionwirings RDL1 may be greater than the top width CD2 of the conductive viaCV1. The lateral dimension (e.g., diameter or width) of the pad portionof the redistribution wirings RDL2 may be greater than the top width CD2of the conductive via CV2. The lateral dimension (e.g., diameter orwidth) of the pad portion of the redistribution wirings RDL3 may begreater than the top width CD4 of the conductive via CV3. Since thebottom width CD3 of the conductive vias CV2 and CV3 is less than thebottom width CD1 of the conductive via CV1, the stacked via structureincluding the conductive vias CV1, CV2, and CV3 is capable of minimizevia crack issue resulted from concentrated stress. As illustrated inFIG. 14A, the conductive vias CV1, CV2, and CV3 are stacked along astacking direction, and the centerlines of the conductive vias CV1, CV2,and CV3 are aligned in the stacking direction. In some alternativeembodiments, not illustrated in figures, the conductive vias are stackedalong a stacking direction, and the centerline of at least oneconductive vias is not aligned with the centerlines of the restconductive vias.

As illustrated in FIG. 14A, the contact area of the redistributionwirings RDL1 and the conductive via CV2 is substantially equal to thecontact area of the redistribution wirings RDL2 and the conductive viaCV3. Further, the contact area of the conductive pillar 150 and theconductive via CV1 is greater than the contact area of theredistribution wirings RDL2 and the conductive via CV3.

As illustrated in FIG. 14B, the conductive vias CV1, CV2, and CV3respectively includes tapered sidewalls. The bottom width CD1 of theconductive via CV1 is less than the top width CD2 of the conductive viaCV1. The bottom width CD3 of the conductive via CV2 is less than the topwidth CD4 of the conductive via CV2. The bottom width CD5 of theconductive via CV3 is less than the top width CD6 of the conductive viaCV3. The bottom width CD3 of the conductive via CV2 and the bottom widthCD5 of the conductive via CV3 is less than the bottom width CD1 of theconductive via CV1. The top width CD4 of the conductive via CV2 isgreater than the bottom width CD1 of the conductive via CV1, and the topwidth CD4 of the conductive via CV2 is less than the top width CD2 ofthe conductive via CV1. The top width CD6 of the conductive via CV3 isgreater than the bottom width CD3 of the conductive via CV2, and the topwidth CD6 of the conductive via CV3 is less than the top width CD4 ofthe conductive via CV2. The bottom width CD1 of the conductive via CV1may range from about 5 micrometers to about 10 micrometers, wherein aratio of the bottom width CD3 of the conductive via CV2 and the bottomwidth CD1 of the conductive via CV1 may range from about 0.7 to about0.9, and a ratio of the bottom width CD5 of the conductive via CV3 andthe bottom width CD3 of the conductive via CV2 may range from about 0.7to about 0.9. The lateral dimension (e.g., diameter or width) of the padportion of the redistribution wirings RDL1 may be greater than the topwidth CD2 of the conductive via CV1. The lateral dimension (e.g.,diameter or width) of the pad portion of the redistribution wirings RDL2may be greater than the top width CD4 of the conductive via CV2. Thelateral dimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL3 may be greater than the top width CD6 of theconductive via CV3. Since the bottom width CD3 of the conductive via CV2and the bottom width CD5 of the conductive via CV3 are less than thebottom width CD1 of the conductive via CV1, the stacked via structureincluding the conductive vias CV1, CV2, and CV3 is capable of minimizevia crack issue resulted from concentrated stress. As illustrated inFIG. 14B, the conductive vias CV1, CV2, and CV3 are stacked along astacking direction, and the centerlines of the conductive vias CV1, CV2,and CV3 are aligned in the stacking direction. In some alternativeembodiments, not illustrated in figures, the conductive vias are stackedalong a stacking direction, and the conductive vias are stacked along astacking direction, and the centerline of at least one conductive viasis not aligned with the centerlines of the rest conductive vias.

As illustrated in FIG. 14B, the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theredistribution wirings RDL1 and the conductive via CV2. Further, thecontact area of the redistribution wirings RDL1 and the conductive viaCV2 is greater than the contact area of the redistribution wirings RDL2and the conductive via CV3.

Referring to FIG. 15A, a stacked via structure including a dielectriclayer PM1, a conductive via CV1, a redistribution wirings RDL1, adielectric layer PM2, a conductive via CV2, a redistribution wiringsRDL2, a dielectric layer PM3, a conductive via CV3, a redistributionwirings RDL3, and a dielectric layer PM4 is proposed. The dielectriclayer PM1 covers the conductive pillar 150 and the protection layer 160a′. The conductive via CV1 is embedded in a via hole defined by thedielectric layer PM1 and electrically connected to the conductive pillar150. The redistribution wirings RDL1 is electrically connected to theconductive pillars 150 through the conductive via CV1, and theredistribution wirings RDL1 includes a pad portion covering thedielectric layer PM1 and the conductive via CV1. The conductive via CV1is entirely covered by the pad portion of the redistribution wiringsRDL1. The dielectric layer PM2 covers the dielectric layer PM1 and theredistribution wirings RDL1. The conductive via CV2 is embedded in a viahole defined by the dielectric layer PM2 and electrically connected tothe redistribution wirings RDL1. The redistribution wirings RDL2 iselectrically connected to the redistribution wirings RDL1 through theconductive via CV2, and the redistribution wirings RDL2 includes a padportion covering the dielectric layer PM2 and the conductive via CV2.The conductive via CV2 is entirely covered by the pad portion of theredistribution wirings RDL2. The dielectric layer PM3 covers thedielectric layer PM2 and the redistribution wirings RDL2. The conductivevia CV3 is embedded in a via hole defined by the dielectric layer PM3and electrically connected to the redistribution wirings RDL2. Theredistribution wirings RDL3 is electrically connected to theredistribution wirings RDL2 through the conductive via CV3, and theredistribution wirings RDL3 includes a pad portion covering thedielectric layer PM3 and the conductive via CV3. The conductive via CV3is entirely covered by the pad portion of the redistribution wiringsRDL3. The dielectric layer PM4 covers the dielectric layer PM3 and theredistribution wirings RDL3.

As illustrated in FIG. 15A, the conductive vias CV1, CV2, and CV3respectively includes vertical sidewalls. The sidewalls of theconductive vias CV1, CV2, and CV3 are substantially aligned. The bottomwidth CD of the conductive vias CV1, CV2, and CV3 is substantially equalto the top width CD of the conductive vias CV1, CV2, and CV3. The widthCD of the conductive vias CV1, CV2, and CV3 may range from about 5micrometers to about 10 micrometers. The lateral dimension (e.g.,diameter or width) of the pad portion of the redistribution wirings RDL1may be greater than the top width CD of the conductive via CV1. Thelateral dimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL2 may be greater than the top width CD of theconductive via CV2. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL3 may be greater thanthe top width CD of the conductive via CV3. Since the conductive viasCV1, CV2, and CV3 respectively includes vertical sidewalls and the widthCD of the conductive vias CV1, CV2, and CV3 are substantial equal, thestacked via structure including the conductive vias CV1, CV2, and CV3 iscapable of minimize via crack issue resulted from concentrated stress.As illustrated in FIG. 15A, the conductive vias CV1, CV2, and CV3 arestacked along a stacking direction, and the centerlines of theconductive vias CV1, CV2, and CV3 are aligned in the stacking direction.In some alternative embodiments, not illustrated in figures, theconductive vias are stacked along a stacking direction, and theconductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 15A, the contact area of the conductive pillar150 and the conductive via CV1 is substantially equal to the contactarea of the redistribution wirings RDL1 and the conductive via CV1. Thecontact area the redistribution wirings RDL1 and the conductive via CV1is substantially equal to the contact area of the conductive via CV2 andthe redistribution wirings RDL1. The contact area the redistributionwirings RDL2 and the conductive via CV2 is substantially equal to thecontact area of the conductive via CV3 and the redistribution wiringsRDL2. Further, the contact area of the conductive via CV3 and theredistribution wirings RDL2 is substantially equal to the contact areaof the redistribution wirings RDL3 and the conductive via CV3.

Referring to FIG. 15B, a stacked via structure including a dielectriclayer PM1, a conductive via CV1, a dielectric layer PM2, a conductivevia CV2, a dielectric layer PM3, a conductive via CV3, and a dielectriclayer PM4 is proposed. The dielectric layer PM1 covers the conductivepillar 150 and the protection layer 160 a′. The conductive via CV1 isembedded in a via hole defined by the dielectric layer PM1 andelectrically connected to the conductive pillar 150. The dielectriclayer PM2 covers the dielectric layer PM1. The conductive via CV2 isembedded in a via hole defined by the dielectric layer PM2 andelectrically connected to the conductive via CV1. The conductive via CV1is aligned with and entirely covered by the conductive via CV2. Thedielectric layer PM3 covers the dielectric layer PM2. The conductive viaCV3 is embedded in a via hole defined by the dielectric layer PM3 andelectrically connected to the conductive via CV2. The conductive via CV2is entirely covered by the conductive via CV3. The dielectric layer PM4covers the dielectric layer PM3.

As illustrated in FIG. 15B, the conductive vias CV1, CV2, and CV3respectively includes vertical sidewalls. The sidewalls of theconductive vias CV1, CV2, and CV3 are substantially aligned. The bottomwidth CD of the conductive vias CV1, CV2, and CV3 is substantially equalto the top width CD of the conductive vias CV1, CV2, and CV3. The widthCD of the conductive vias CV1, CV2, and CV3 may range from about 5micrometers to about 10 micrometers. Since the conductive vias CV1, CV2,and CV3 respectively includes vertical sidewalls and the width CD of theconductive vias CV1, CV2, and CV3 are substantial equal, the stacked viastructure including the conductive vias CV1, CV2, and CV3 is capable ofminimize via crack issue resulted from concentrated stress. Asillustrated in FIG. 15B, the conductive vias CV1, CV2, and CV3 arestacked along a stacking direction, and the centerlines of theconductive vias CV1, CV2, and CV3 are aligned in the stacking direction.In some alternative embodiments, not illustrated in figures, theconductive vias are stacked along a stacking direction, and theconductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 15B, the contact area of the conductive pillar150 and the conductive via CV1 is substantially equal to the contactarea of the conductive via CV1 and the conductive via CV2. The contactarea of the conductive via CV1 and the conductive via CV2 issubstantially equal to the contact area of the conductive via CV2 andthe conductive via CV3. Further, the contact area of the conductive viaCV2 and the conductive via CV3 is substantially equal to the contactarea of the redistribution wirings RDL3 and the conductive via CV3.

Referring to FIG. 11 and FIG. 16 , a PoP structure illustrated in FIG.16 is similar to the PoP structure illustrated in FIG. 11 except thatthe front side redistribution circuit structure of the package structureP illustrated in FIG. 16 includes dielectric layers PM1 through PM4,conductive vias CV1 through CV4, and redistribution wirings RDL1 throughRDL4. A dielectric layer PM5, conductive pads 220, and conductiveterminals 230 are formed over the front side redistribution circuitstructure. The dielectric layer PM5 is formed on the dielectric layerPM4 to cover redistribution wirings RDL4. The conductive pads 220 areformed on the dielectric layer PM5 and are electrically connected to theredistribution wirings RDL4. The conductive terminals 230 lands on theconductive pads 220 and electrically connected to the front sideredistribution circuit structure through the pads 220. In someembodiments, the conductive pads 220 include under-ball metallurgy (UBM)patterns for ball mount and/or connection pads for mounting of passivecomponents. The dielectric layer PM5 may be formed of nitride such assilicon nitride, oxide such as silicon oxide, PSG, BSG, BPSG, or thelike. The material of the dielectric layer PM5 may be identical to ordifferent from the dielectric layers PM1, PM2, PM3, and PM4.

Referring to FIG. 17A through FIG. 17C, a stacked via structureincluding a dielectric layer PM1, a conductive via CV1, a redistributionwirings RDL1, a dielectric layer PM2, a conductive via CV2, aredistribution wirings RDL2, a dielectric layer PM3, a conductive viaCV3, a redistribution wirings RDL3, a dielectric layer PM4, a conductivevia CV4, a redistribution wirings RDL4, and a dielectric layer PM5 isproposed. The dielectric layer PM1 covers the conductive pillar 150 andthe protection layer 160 a′. The conductive via CV1 is embedded in a viahole defined by the dielectric layer PM1 and electrically connected tothe conductive pillar 150. The redistribution wirings RDL1 iselectrically connected to the conductive pillars 150 through theconductive via CV1, and the redistribution wirings RDL1 includes a padportion covering the dielectric layer PM1 and the conductive via CV1.The conductive via CV1 is entirely covered by the pad portion of theredistribution wirings RDL1. The dielectric layer PM2 covers thedielectric layer PM1 and the redistribution wirings RDL1. The conductivevia CV2 is embedded in a via hole defined by the dielectric layer PM2and electrically connected to the redistribution wirings RDL1. Theredistribution wirings RDL2 is electrically connected to theredistribution wirings RDL1 through the conductive via CV2, and theredistribution wirings RDL2 includes a pad portion covering thedielectric layer PM2 and the conductive via CV2. The conductive via CV2is entirely covered by the pad portion of the redistribution wiringsRDL2. The dielectric layer PM3 covers the dielectric layer PM2 and theredistribution wirings RDL2. The conductive via CV3 is embedded in a viahole defined by the dielectric layer PM3 and electrically connected tothe redistribution wirings RDL2. The redistribution wirings RDL3 iselectrically connected to the redistribution wirings RDL2 through theconductive via CV3, and the redistribution wirings RDL3 includes a padportion covering the dielectric layer PM3 and the conductive via CV3.The conductive via CV3 is entirely covered by the pad portion of theredistribution wirings RDL3. The dielectric layer PM4 covers thedielectric layer PM3 and the redistribution wirings RDL3. The dielectriclayer PM4 covers the dielectric layer PM3 and the redistribution wiringsRDL3. The conductive via CV4 is embedded in a via hole defined by thedielectric layer PM4 and electrically connected to the redistributionwirings RDL3. The redistribution wirings RDL4 is electrically connectedto the redistribution wirings RDL3 through the conductive via CV4, andthe redistribution wirings RDL4 includes a pad portion covering thedielectric layer PM4 and the conductive via CV4. The conductive via CV4is entirely covered by the pad portion of the redistribution wiringsRDL4.

As illustrated in FIG. 17A, the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive vias CV1 through CV3 is less than the top width CD2 of theconductive vias CV1 through CV3. The bottom width CD3 of the conductivevia CV4 is less than the top width CD4 of the conductive via CV4. Thebottom width CD3 of the conductive via CV4 is less than the bottom widthCD1 of the conductive vias CV1 through CV3. The top width CD4 of theconductive via CV4 is greater than the bottom width CD1 of theconductive vias CV1 through CV3, and the top width CD4 of the conductivevia CV4 is less than the top width CD2 of the conductive vias CV1through CV3. The bottom width CD1 of the conductive vias CV1 through CV3may range from about 5 micrometers to about 10 micrometers, and a ratioof the bottom width CD3 of the conductive via CV4 and the bottom widthCD1 of the conductive vias CV1 through CV3 may range from about 0.7 toabout 0.9. The lateral dimension (e.g., diameter or width) of the padportion of the redistribution wirings RDL1 may be greater than the topwidth CD2 of the conductive via CV1. The lateral dimension (e.g.,diameter or width) of the pad portion of the redistribution wirings RDL2may be greater than the top width CD2 of the conductive via CV2. Thelateral dimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL3 may be greater than the top width CD2 of theconductive via CV3. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL4 may be greater thanthe top width CD4 of the conductive via CV4. Since the bottom width CD3of the conductive via CV4 is less than the bottom width CD1 of theconductive vias CV1 through CV3, the stacked via structure including theconductive vias CV1, CV2, CV3, and CV4 is capable of minimize via crackissue resulted from concentrated stress. As illustrated in FIG. 17A, theconductive vias CV1, CV2, CV3, and CV4 are stacked along a stackingdirection, and the centerlines of the conductive vias CV1, CV2, CV3, andCV4 are aligned in the stacking direction. In some alternativeembodiments, not illustrated in figures, the conductive vias are stackedalong a stacking direction, and the conductive vias are stacked along astacking direction, and the centerline of at least one conductive viasis not aligned with the centerlines of the rest conductive vias.

As illustrated in FIG. 17A, the contact area of the conductive pillar150 and the conductive via CV1 is substantially equal to the contactarea of the conductive via CV2 and the redistribution wirings RDL1. Thecontact area of the conductive via CV2 and the redistribution wiringsRDL1 is substantially equal to the contact area of the conductive viaCV3 and the redistribution wirings RDL2. Further, the contact area ofthe conductive via CV3 and the redistribution wirings RDL2 is greaterthan the contact area of the conductive via CV4 and the redistributionwirings RDL3.

As illustrated in FIG. 17B, the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive vias CV1 and CV2 is less than the top width CD2 of theconductive vias CV1 and CV2. The bottom width CD3 of the conductive viasCV3 and CV4 is less than the top width CD4 of the conductive vias CV3and CV4. The bottom width CD3 of the conductive vias CV3 and CV4 is lessthan the bottom width CD1 of the conductive vias CV1 and CV2. The topwidth CD4 of the conductive vias CV3 and CV4 is greater than the bottomwidth CD1 of the conductive vias CV1 and CV2, and the top width CD4 ofthe conductive vias CV3 and CV4 is less than the top width CD2 of theconductive vias CV1 and CV2. The bottom width CD1 of the conductive viasCV1 and CV2 may range from about 5 micrometers to about 10 micrometers,and a ratio of the bottom width CD3 of the conductive vias CV3 and CV4and the bottom width CD1 of the conductive vias CV1 and CV2 may rangefrom about 0.7 to about 0.9. The lateral dimension (e.g., diameter orwidth) of the pad portion of the redistribution wirings RDL1 may begreater than the top width CD2 of the conductive via CV1. The lateraldimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL2 may be greater than the top width CD2 of theconductive via CV2. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL3 may be greater thanthe top width CD2 of the conductive via CV3. The lateral dimension(e.g., diameter or width) of the pad portion of the redistributionwirings RDL4 may be greater than the top width CD4 of the conductive viaCV4. Since the bottom width CD3 of the conductive vias CV3 and CV4 isless than the bottom width CD1 of the conductive vias CV1 and CV2, thestacked via structure including the conductive vias CV1, CV2, CV3, andCV4 is capable of minimize via crack issue resulted from concentratedstress. As illustrated in FIG. 17B, the conductive vias CV1, CV2, CV3,and CV4 are stacked along a stacking direction, and the centerlines ofthe conductive vias CV1, CV2, CV3, and CV4 are aligned in the stackingdirection. In some alternative embodiments, not illustrated in figures,the conductive vias are stacked along a stacking direction, and theconductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 17B, the contact area of the conductive pillar150 and the conductive via CV1 is substantially equal to the contactarea of the conductive via CV2 and the redistribution wirings RDL1. Thecontact area of the conductive via CV2 and the redistribution wiringsRDL1 is greater than the contact area of the conductive via CV3 and theredistribution wirings RDL2. Further, the contact area of the conductivevia CV3 and the redistribution wirings RDL2 is substantially equal tothe contact area of the conductive via CV4 and the redistributionwirings RDL3.

As illustrated in FIG. 17C, the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive via CV1 is less than the top width CD2 of the conductive viasCV2 through CV4. The bottom width CD3 of the conductive vias CV2 throughCV4 is less than the top width CD4 of the conductive vias CV2 throughCV4. The bottom width CD3 of the conductive vias CV2 through CV4 is lessthan the bottom width CD1 of the conductive via CV1. The top width CD4of the conductive vias CV2 through CV4 is greater than the bottom widthCD1 of the conductive via CV1, and the top width CD4 of the conductivevias CV2 through CV4 is less than the top width CD2 of the conductivevia CV1. The bottom width CD1 of the conductive via CV1 may range fromabout 5 micrometers to about 10 micrometers, and a ratio of the bottomwidth CD3 of the conductive vias CV2 through CV4 and the bottom widthCD1 of the conductive via CV1 may range from about 0.7 to about 0.9. Thelateral dimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL1 may be greater than the top width CD2 of theconductive via CV1. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL2 may be greater thanthe top width CD4 of the conductive via CV2. The lateral dimension(e.g., diameter or width) of the pad portion of the redistributionwirings RDL3 may be greater than the top width CD4 of the conductive viaCV3. The lateral dimension (e.g., diameter or width) of the pad portionof the redistribution wirings RDL4 may be greater than the top width CD4of the conductive via CV4. Since the bottom width CD3 of the conductivevias CV2 through CV4 is less than the bottom width CD1 of the conductivevia CV1, the stacked via structure including the conductive vias CV1,CV2, CV3, and CV4 is capable of minimize via crack issue resulted fromconcentrated stress. As illustrated in FIG. 17C, the conductive viasCV1, CV2, CV3, and CV4 are stacked along a stacking direction, and thecenterlines of the conductive vias CV1, CV2, CV3, and CV4 are aligned inthe stacking direction. In some alternative embodiments, not illustratedin figures, the conductive vias are stacked along a stacking direction,and the conductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 17C, the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theconductive via CV2 and the redistribution wirings RDL1. The contact areaof the conductive via CV2 and the redistribution wirings RDL1 issubstantially equal to the contact area of the conductive via CV3 andthe redistribution wirings RDL2. Further, the contact area of theconductive via CV3 and the redistribution wirings RDL2 is substantiallyequal to the contact area of the conductive via CV4 and theredistribution wirings RDL3.

As illustrated in FIG. 18A, the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive vias CV1 and CV2 is less than the top width CD2 of theconductive vias CV1 and CV2. The bottom width CD3 of the conductive viaCV3 is less than the top width CD4 of the conductive via CV3. The bottomwidth CD5 of the conductive via CV4 is less than the top width CD6 ofthe conductive via CV4. The bottom width CD5 of the conductive via CV4is less than the bottom width CD3 of the conductive via CV3, and thebottom width CD3 of the conductive via CV3 is less than the bottom widthCD1 of the conductive vias CV1 and CV2. The top width CD4 of theconductive via CV3 is greater than the bottom width CD1 of theconductive vias CV1 and CV2, and the top width CD4 of the conductive viaCV3 is less than the top width CD2 of the conductive vias CV1 and CV2.The top width CD6 of the conductive via CV4 is greater than the bottomwidth CD3 of the conductive via CV3, and the top width CD6 of theconductive via CV4 is less than the top width CD4 of the conductive viaCV3. The bottom width CD1 of the conductive vias CV1 and CV2 may rangefrom about 5 micrometers to about 10 micrometers, wherein a ratio of thebottom width CD3 of the conductive via CV3 and the bottom width CD1 ofthe conductive vias CV1 may range from about 0.7 to about 0.9, and aratio of the bottom width CD5 of the conductive via CV4 and the bottomwidth CD3 of the conductive via CV3 may range from about 0.7 to about0.9. The lateral dimension (e.g., diameter or width) of the pad portionof the redistribution wirings RDL1 may be greater than the top width CD2of the conductive via CV1. The lateral dimension (e.g., diameter orwidth) of the pad portion of the redistribution wirings RDL2 may begreater than the top width CD4 of the conductive via CV2. The lateraldimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL3 may be greater than the top width CD4 of theconductive via CV3. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL4 may be greater thanthe top width CD6 of the conductive via CV4. Since the bottom width CD3of the conductive vias CV2 and the bottom width CD5 of the conductivevia CV4 are less than the bottom width CD1 of the conductive via CV1,the stacked via structure including the conductive vias CV1, CV2, CV3and CV4 is capable of minimize via crack issue resulted fromconcentrated stress. As illustrated in FIG. 18A, the conductive viasCV1, CV2, CV3, and CV4 are stacked along a stacking direction, and thecenterlines of the conductive vias CV1, CV2, CV3, and CV4 are aligned inthe stacking direction. In some alternative embodiments, not illustratedin figures, the conductive vias are stacked along a stacking direction,and the conductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 18A, the contact area of the conductive pillar150 and the conductive via CV1 is substantially equal to the contactarea of the conductive via CV2 and the redistribution wirings RDL1. Thecontact area of the conductive via CV2 and the redistribution wiringsRDL1 is greater than the contact area of the conductive via CV3 and theredistribution wirings RDL2. Further, the contact area of the conductivevia CV3 and the redistribution wirings RDL2 is greater than the contactarea of the conductive via CV4 and the redistribution wirings RDL3.

As illustrated in FIG. 18B, the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive via CV1 is less than the top width CD2 of the conductive viaCV1. The bottom width CD3 of the conductive vias CV2 and CV3 is lessthan the top width CD4 of the conductive vias CV2 and CV3. The bottomwidth CD5 of the conductive via CV4 is less than the top width CD6 ofthe conductive via CV4. The bottom width CD5 of the conductive via CV4is less than the bottom width CD3 of the conductive vias CV2 and CV3,and the bottom width CD3 of the conductive vias CV2 and CV3 is less thanthe bottom width CD1 of the conductive via CV1. The top width CD4 of theconductive vias CV2 and CV3 is greater than the bottom width CD1 of theconductive via CV1, and the top width CD4 of the conductive vias CV2 andCV3 is less than the top width CD2 of the conductive via CV1. The topwidth CD6 of the conductive via CV4 is greater than the bottom width CD3of the conductive vias CV2 and CV3, and the top width CD6 of theconductive via CV4 is less than the top width CD4 of the conductive viasCV2 and CV3. The bottom width CD1 of the conductive via CV1 may rangefrom about 5 micrometers to about 10 micrometers, wherein a ratio of thebottom width CD3 of the conductive via CV2 and the bottom width CD1 ofthe conductive via CV1 may range from about 0.7 to about 0.9, and aratio of the bottom width CD5 of the conductive via CV4 and the bottomwidth CD3 of the conductive via CV2 may range from about 0.7 to about0.9. The lateral dimension (e.g., diameter or width) of the pad portionof the redistribution wirings RDL1 may be greater than the top width CD2of the conductive via CV1. The lateral dimension (e.g., diameter orwidth) of the pad portion of the redistribution wirings RDL2 may begreater than the top width CD4 of the conductive via CV2. The lateraldimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL3 may be greater than the top width CD4 of theconductive via CV3. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL4 may be greater thanthe top width CD6 of the conductive via CV4. Since the bottom width CD3of the conductive vias CV2 and CV3 and the bottom width CD5 of theconductive via CV4 are less than the bottom width CD1 of the conductivevia CV1, the stacked via structure including the conductive vias CV1,CV2, CV3 and CV4 is capable of minimize via crack issue resulted fromconcentrated stress. As illustrated in FIG. 18B, the conductive viasCV1, CV2, CV3, and CV4 are stacked along a stacking direction, and thecenterlines of the conductive vias CV1, CV2, CV3, and CV4 are aligned inthe stacking direction. In some alternative embodiments, not illustratedin figures, the conductive vias are stacked along a stacking direction,and the conductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 18B, the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theconductive via CV2 and the redistribution wirings RDL1. The contact areaof the conductive via CV2 and the redistribution wirings RDL1 issubstantially equal to the contact area of the conductive via CV3 andthe redistribution wirings RDL2. Further, the contact area of theconductive via CV3 and the redistribution wirings RDL2 is greater thanthe contact area of the conductive via CV4 and the redistributionwirings RDL3.

As illustrated in FIG. 18C, the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive via CV1 is less than the top width CD2 of the conductive viaCV1. The bottom width CD3 of the conductive via CV2 is less than the topwidth CD4 of the conductive via CV2. The bottom width CD5 of theconductive vias CV3 and CV4 is less than the top width CD6 of theconductive vias CV3 and CV4. The bottom width CD5 of the conductive viasCV3 and CV4 is less than the bottom width CD3 of the conductive via CV2,and the bottom width CD3 of the conductive via CV2 is less than thebottom width CD1 of the conductive via CV1. The top width CD4 of theconductive via CV2 is greater than the bottom width CD1 of theconductive via CV1, and the top width CD4 of the conductive via CV2 isless than the top width CD2 of the conductive via CV1. The top width CD6of the conductive vias CV3 and CV4 is greater than the bottom width CD3of the conductive via CV2, and the top width CD6 of the conductive viasCV3 and CV4 is less than the top width CD4 of the conductive via CV2.The bottom width CD1 of the conductive via CV1 may range from about 5micrometers to about 10 micrometers, wherein a ratio of the bottom widthCD3 of the conductive via CV2 and the bottom width CD1 of the conductivevia CV1 may range from about 0.7 to about 0.9, and a ratio of the bottomwidth CD5 of the conductive vias CV3 and the bottom width CD3 of theconductive via CV2 may range from about 0.7 to about 0.9. The lateraldimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL1 may be greater than the top width CD2 of theconductive via CV1. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL2 may be greater thanthe top width CD4 of the conductive via CV2. The lateral dimension(e.g., diameter or width) of the pad portion of the redistributionwirings RDL3 may be greater than the top width CD6 of the conductive viaCV3. The lateral dimension (e.g., diameter or width) of the pad portionof the redistribution wirings RDL4 may be greater than the top width CD6of the conductive via CV4. Since the bottom width CD3 of the conductivevia CV2 and the bottom width CD5 of the conductive vias CV3 and CV4 areless than the bottom width CD1 of the conductive via CV1, the stackedvia structure including the conductive vias CV1, CV2, CV3 and CV4 iscapable of minimize via crack issue resulted from concentrated stress.As illustrated in FIG. 18C, the conductive vias CV1, CV2, CV3, and CV4are stacked along a stacking direction, and the centerlines of theconductive vias CV1, CV2, CV3, and CV4 are aligned in the stackingdirection. In some alternative embodiments, not illustrated in figures,the conductive vias are stacked along a stacking direction, and theconductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 18C, the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theconductive via CV2 and the redistribution wirings RDL1. The contact areaof the conductive via CV2 and the redistribution wirings RDL1 is greaterthan the contact area of the conductive via CV3 and the redistributionwirings RDL2. Further, the contact area of the conductive via CV3 andthe redistribution wirings RDL2 is substantially equal to the contactarea of the conductive via CV4 and the redistribution wirings RDL3.

As illustrated in FIG. 19 , the conductive vias CV1, CV2, CV3, and CV4respectively includes tapered sidewalls. The bottom width CD1 of theconductive via CV1 is less than the top width CD2 of the conductive viaCV1. The bottom width CD3 of the conductive via CV2 is less than the topwidth CD4 of the conductive via CV2. The bottom width CD5 of theconductive via CV3 is less than the top width CD6 of the conductive viaCV3. The bottom width CD7 of the conductive via CV4 is less than the topwidth CD8 of the conductive via CV4. The bottom width CD7 of theconductive via CV4 is less than the bottom width CD5 of the conductivevia CV3, the bottom width CD5 of the conductive via CV3 is less than thebottom width CD3 of the conductive via CV2, and the bottom width CD3 ofthe conductive via CV2 is less than the bottom width CD1 of theconductive via CV1. The top width CD4 of the conductive via CV2 isgreater than the bottom width CD1 of the conductive via CV1, and the topwidth CD4 of the conductive via CV2 is less than the top width CD2 ofthe conductive via CV1. The top width CD6 of the conductive via CV3 isgreater than the bottom width CD3 of the conductive via CV2, and the topwidth CD6 of the conductive via CV3 is less than the top width CD4 ofthe conductive via CV2. The top width CD8 of the conductive via CV4 isgreater than the bottom width CD5 of the conductive via CV3, and the topwidth CD8 of the conductive via CV4 is less than the top width CD6 ofthe conductive via CV3. The bottom width CD1 of the conductive via CV1may range from about 5 micrometers to about 10 micrometers, wherein aratio of the bottom width CD3 of the conductive via CV2 and the bottomwidth CD1 of the conductive via CV1 may range from about 0.7 to about0.9, a ratio of the bottom width CD5 of the conductive via CV3 and thebottom width CD3 of the conductive via CV2 may range from about 0.7 toabout 0.9, and a ratio of the bottom width CD7 of the conductive via CV4and the bottom width CD5 of the conductive via CV3 may range from about0.7 to about 0.9. The lateral dimension (e.g., diameter or width) of thepad portion of the redistribution wirings RDL1 may be greater than thetop width CD2 of the conductive via CV1. The lateral dimension (e.g.,diameter or width) of the pad portion of the redistribution wirings RDL2may be greater than the top width CD4 of the conductive via CV2. Thelateral dimension (e.g., diameter or width) of the pad portion of theredistribution wirings RDL3 may be greater than the top width CD6 of theconductive via CV3. The lateral dimension (e.g., diameter or width) ofthe pad portion of the redistribution wirings RDL4 may be greater thanthe top width CD6 of the conductive via CV4. Since the bottom width CD3,CD5 and CD7 of the conductive vias CV2, CV3 and CV4 are less than thebottom width CD1 of the conductive via CV1, the stacked via structureincluding the conductive vias CV1, CV2, CV3 and CV4 is capable ofminimize via crack issue resulted from concentrated stress. Asillustrated in FIG. 19 , the conductive vias CV1, CV2, CV3, and CV4 arestacked along a stacking direction, and the centerlines of theconductive vias CV1, CV2, CV3, and CV4 are aligned in the stackingdirection. In some alternative embodiments, not illustrated in figures,the conductive vias are stacked along a stacking direction, and theconductive vias are stacked along a stacking direction, and thecenterline of at least one conductive vias is not aligned with thecenterlines of the rest conductive vias.

As illustrated in FIG. 19 , the contact area of the conductive pillar150 and the conductive via CV1 is greater than the contact area of theconductive via CV2 and the redistribution wirings RDL1. The contact areaof the conductive via CV2 and the redistribution wirings RDL1 is greaterthan the contact area of the conductive via CV3 and the redistributionwirings RDL2. Further, the contact area of the conductive via CV3 andthe redistribution wirings RDL2 is greater than the contact area of theconductive via CV4 and the redistribution wirings RDL3.

In the above-mentioned embodiments, since the width of an upper tieredconductive via is not less than the width of a lower tiered conductivevia, the structural strength of the stacked via structure may beenhanced.

In accordance with some embodiments of the disclosure, a stacked viastructure disposed on a conductive pillar of a semiconductor die isprovided. The stacked via structure includes a first dielectric layer, afirst conductive via, a first redistribution wiring, a second dielectriclayer, a second conductive via, and a second redistribution wiring. Thefirst dielectric layer covers the semiconductor die. The firstconductive via is embedded in the first dielectric layer andelectrically connected to the conductive pillar of the semiconductordie. The first redistribution wiring covers a top surface of the firstconductive via and a top surface of the first dielectric layer. Thesecond dielectric layer covers the first dielectric layer and the firstredistribution wiring. The second conductive via is embedded in thesecond dielectric layer and landed on the first redistribution wiring.The second redistribution wiring covers a top surface of the secondconductive via and a top surface of the second dielectric layer, and afirst lateral dimension of the first conductive via is greater than asecond lateral dimension of the second conductive via. In someembodiments, the stacked via structure further includes a thirddielectric layer, a third conductive via, and a third redistributionwiring. The third dielectric layer covers the second dielectric layerand the second redistribution wiring. The third conductive via isembedded in the third dielectric layer and landed on the secondredistribution wiring. The third redistribution wiring covers a topsurface of the third conductive via and a top surface of the thirddielectric layer. In some embodiments, the second lateral dimension ofthe second conductive via is greater than a third lateral dimension ofthe third conductive via. In some embodiments, the second lateraldimension of the second conductive via is equal to a third lateraldimension of the third conductive via. In some embodiments, the stackedvia structure further includes a fourth dielectric layer, a fourthconductive via, and a fourth redistribution wiring. The fourthdielectric layer covers the third dielectric layer and the thirdredistribution wiring. The fourth conductive via is embedded in thefourth dielectric layer and landed on the third redistribution wiring.The fourth redistribution wiring covers a top surface of the fourthconductive via and a top surface of the fourth dielectric layer. In someembodiments, the third lateral dimension of the third conductive via isgreater than a fourth lateral dimension of the fourth conductive via. Insome embodiments, the third lateral dimension of the third conductivevia is equal to a fourth lateral dimension of the fourth conductive via.In some embodiments, the first conductive via comprises first taperedsidewalls, and the second conductive via comprises second taperedsidewalls. In some embodiments, the first conductive via comprises firstvertical sidewalls, and the second conductive via comprises secondvertical sidewalls. In some embodiments, a first centerline of the firstconductive via is aligned with a second centerline of the secondconductive via. In some embodiments, a first centerline of the firstconductive via is offset from a second centerline of the secondconductive via.

In accordance with some embodiments of the disclosure, a stacked viastructure disposed on a conductive pillar of a semiconductor die isprovided. The stacked via structure includes a first dielectric layer, afirst conductive via, a first redistribution wiring, a second dielectriclayer, a second conductive via, and a second redistribution wiring. Thefirst dielectric layer covers the semiconductor die. The firstconductive via is embedded in the first dielectric layer and landed onthe conductive pillar of the semiconductor die. The first redistributionwiring covers a top surface of the first conductive via and a topsurface of the first dielectric layer. The second dielectric layercovers the first dielectric layer and the first redistribution wiring.The second conductive via is embedded in the second dielectric layer andlanded on the first redistribution wiring. The second redistributionwiring covers a top surface of the second conductive via and a topsurface of the second dielectric layer, and a first contact area of thefirst conductive via and the conductive pillar is greater than a secondcontact area of the second conductive via and the first redistributionwiring. In some embodiments, the stacked via structure further includesa third dielectric layer, a third conductive via, and a thirdredistribution wiring. The third dielectric layer covers the seconddielectric layer and the second redistribution wiring. The thirdconductive via is embedded in the third dielectric layer and landed onthe second redistribution wiring. The third redistribution wiring coversa top surface of the third conductive via and a top surface of the thirddielectric layer, and the second contact area is greater than or equalto a third contact area of the third conductive via and the secondredistribution wiring. In some embodiments, the stacked via structurefurther includes a fourth dielectric layer, a fourth conductive via, anda fourth redistribution wiring. The fourth dielectric layer covers thethird dielectric layer and the third redistribution wiring. The fourthconductive via is embedded in the fourth dielectric layer and landed onthe third redistribution wiring. The fourth redistribution wiring coversa top surface of the fourth conductive via and a top surface of thefourth dielectric layer, and the third contact area is greater than orequal to a fourth contact area of the fourth conductive via and thethird redistribution wiring. In some embodiments, the first conductivevia comprises tapered sidewalls or vertical sidewalls, and the secondconductive via comprises tapered sidewalls or vertical sidewalls. Insome embodiments, a first centerline of the first conductive via isaligned with a second centerline of the second conductive via. In someembodiments, a first centerline of the first conductive via is offsetfrom a second centerline of the second conductive via.

In accordance with some embodiments of the disclosure, a stacked viastructure including stacked dielectric layers, a first conductive via,and a second conductive via is providing. The stacked dielectric layerscover a semiconductor die laterally encapsulated by an insulatingencapsulation. The first conductive via penetrates through a firstdielectric layer among the stacked dielectric layers. The firstconductive via is landed on and electrically connected to a conductivepillar of the semiconductor die. The second conductive via penetratesthrough a second dielectric layer among the stacked dielectric layers.The second dielectric layer covers the first dielectric layer. Thesecond conductive via is electrically connected to the first conductivevia. A first width of the first conductive via is substantially equal toa second width of the second conductive via. In some embodiments, thefirst conductive via is landed on the second conductive via, the firstconductive via and the second conductive via are stacked along astacking direction, a first centerline of the first conductive via isaligned with a second centerline of the second conductive via in thestacking direction, and first vertical sidewalls of the first conductivevia are aligned with second vertical sidewalls of the second conductivevia in the stacking direction. In some embodiments, the stacked viastructure further includes a redistribution wiring disposed between thefirst conductive via and the second conductive via, wherein theredistribution wiring covers the first conductive via and the firstdielectric layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A stacked via structure, disposed on a conductivepillar of a semiconductor die, the stacked via structure comprising: afirst dielectric layer disposed on the semiconductor die; a firstconductive via embedded in the first dielectric layer, wherein the firstconductive via is in physical contact with the conductive pillar of thesemiconductor die; a first redistribution wiring disposed on the firstconductive via and the first dielectric layer; a second dielectric layerdisposed over the first dielectric layer and the first redistributionwiring; a second conductive via embedded in the second dielectric layer,wherein the second conductive via is electrically connected to theconductive pillar of the semiconductor die through the firstredistribution wiring; and a second redistribution wiring disposed onthe second conductive via and the second dielectric layer, wherein afirst lateral dimension of the first conductive via is greater than asecond lateral dimension of the second conductive via.
 2. The stackedvia structure as claimed in claim 1 further comprising: a thirddielectric layer disposed on the second dielectric layer and the secondredistribution wiring; a third conductive via embedded in the thirddielectric layer and landed on the second redistribution wiring; and athird redistribution wiring disposed on the third conductive via and thethird dielectric layer.
 3. The stacked via structure as claimed in claim2, wherein the second lateral dimension of the second conductive via isgreater than a third lateral dimension of the third conductive via. 4.The stacked via structure as claimed in claim 2, wherein the secondlateral dimension of the second conductive via is substantially equal toa third lateral dimension of the third conductive via.
 5. The stackedvia structure as claimed in claim 2 further comprising: a fourthdielectric layer disposed on the third dielectric layer and the thirdredistribution wiring; a fourth conductive via embedded in the fourthdielectric layer and landed on the third redistribution wiring; and afourth redistribution wiring disposed on the fourth conductive via andthe fourth dielectric layer.
 6. The stacked via structure as claimed inclaim 5, wherein the third lateral dimension of the third conductive viais greater than a fourth lateral dimension of the fourth conductive via.7. The stacked via structure as claimed in claim 5, wherein the thirdlateral dimension of the third conductive via is substantially equal toa fourth lateral dimension of the fourth conductive via.
 8. The stackedvia structure as claimed in claim 1, wherein the first conductive viacomprises first tapered sidewalls, and the second conductive viacomprises second tapered sidewalls.
 9. The stacked via structure asclaimed in claim 1, wherein the first conductive via comprises firstvertical sidewalls, and the second conductive via comprises secondvertical sidewalls.
 10. The stacked via structure as claimed in claim 1,wherein a first centerline of the first conductive via is substantiallyaligned with a second centerline of the second conductive via.
 11. Thestacked via structure as claimed in claim 1, wherein a first centerlineof the first conductive via is offset from a second centerline of thesecond conductive via.
 12. A stacked via structure, disposed on asurface of a semiconductor die, the stacked via structure comprising: afirst dielectric layer disposed on the semiconductor die; a firstconductive via embedded in the first dielectric layer, wherein the firstconductive via is in physical contact with the surface of thesemiconductor die; a first redistribution wiring disposed on the firstconductive via and the first dielectric layer; a second dielectric layerdisposed on the first dielectric layer and the first redistributionwiring; a second conductive via embedded in the second dielectric layer,wherein the second conductive via is electrically connected to thesemiconductor die through the first redistribution wiring; and a secondredistribution wiring disposed on the second conductive via and thesecond dielectric layer, wherein a first contact area of the firstconductive via and the semiconductor die is greater than a secondcontact area of the second conductive via and the first redistributionwiring.
 13. The stacked via structure as claimed in claim 12 furthercomprising: a third dielectric layer disposed on the second dielectriclayer and the second redistribution wiring; a third conductive viaembedded in the third dielectric layer and landed on the secondredistribution wiring; and a third redistribution wiring disposed on thethird conductive via and the third dielectric layer, wherein the secondcontact area is greater than or equal to a third contact area of thethird conductive via and the second redistribution wiring.
 14. Thestacked via structure as claimed in claim 13 further comprising: afourth dielectric layer disposed on the third dielectric layer and thethird redistribution wiring; a fourth conductive via embedded in thefourth dielectric layer and landed on the third redistribution wiring;and a fourth redistribution wiring disposed on the fourth conductive viaand the fourth dielectric layer, wherein the third contact area isgreater than or equal to a fourth contact area of the fourth conductivevia and the third redistribution wiring.
 15. The stacked via structureas claimed in claim 12, wherein the first conductive via comprisestapered sidewalls or vertical sidewalls, and the second conductive viacomprises tapered sidewalls or vertical sidewalls.
 16. The stacked viastructure as claimed in claim 12, wherein a first centerline of thefirst conductive via is substantially aligned with a second centerlineof the second conductive via.
 17. The stacked via structure as claimedin claim 12, wherein a first centerline of the first conductive via isoffset from a second centerline of the second conductive via.
 18. Astructure, comprising: a semiconductor die comprising conductiveterminals; conductive through vias; an insulating encapsulationlaterally encapsulating the semiconductor die and the conductive throughvias; a redistribution circuit structure, comprising: stacked dielectriclayers covering the semiconductor die and the insulating encapsulation;a first conductive via embedded in a bottommost dielectric layer amongthe stacked dielectric layers, wherein the first conductive via is inphysical contact with at least one of the conductive terminals or theconductive through vias; a first redistribution wiring disposed on thefirst conductive via and the first dielectric layer; a second conductivevia embedded in an upper dielectric layer among the stacked dielectriclayers, wherein the second conductive via is electrically connected tothe at least one of the conductive terminals or the conductive throughvias through the first redistribution wiring; and a secondredistribution wiring disposed on the second conductive via, wherein afirst lateral dimension of the first conductive via is greater than asecond lateral dimension of the second conductive via.
 19. The structureas claimed in claim 18, wherein a first centerline of the firstconductive via is offset from a second centerline of the secondconductive via.
 20. The structure as claimed in claim 18, wherein afirst centerline of the first conductive via is substantially alignedwith a second centerline of the second conductive via.